Microfluidic device and method of manufacturing the same

Details Microfluidic device and method of manufacturing the same Microfluidic device and method of manufacturing the same

2006-04-28

2009-08-25

Warden, Jill (Department: 1797)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S313000, C430S314000, C430S396000, C156S044000

Reexamination Certificate

active

07579136

ABSTRACT:
Provided is a method of manufacturing a microfluidic device in which coating film patterns made of a coupling agent are formed in microchannels. The method includes: forming the coating film patterns made of the coupling agent on a Si substrate; selectively oxidizing coupling agent-free regions of the Si substrate having thereon the coating film patterns made of the coupling agent using an oxidizing agent with an oxidation potential from 1 to 2 V; and adhering a PDMS (polydimethylsiloxane) microchannel structure to the selectively oxidized Si substrate to form the microchannels.

REFERENCES:
Childs, William R. and Nuzzo, Ralph G., “Large-Area Patterning of Coinage-Metal Thin Films Using Decal Transfer Lithography,”Langmuir(2005) 21: 195-202.
Delamarche, Emmanuel et al., “Patterned Delivery of Immunoglobulins to Surfaces Using Microfluidic Networks,”Science(1997) 276: 779-781.
McDonald, Cooper J. and Whitesides, George M., “Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices,”Accounts of Chemical Research(2002) 35(7): 491-499.

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