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Astigmatism-correction device and charged-particle-beam...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Automated method of correcting aberrations in electron beam,...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Automatic blackening degree adjustment system

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Automatic control system

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Automatic steering of a high velocity beam of charged particles

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Backscattered electron detector for an electron beam apparatus

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Beam automation in charged-particle-beam systems

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam blanker driver system and method

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam column for charged particle beam device

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam control assembly for ribbon beam of ions for ion...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam current measuring instrument and beam current measuring...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Beam current meter

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Beam deflecting method, beam deflector for scanning, ion...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam deflector

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Beam delivery system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam detector

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Beam directing system and method for use in a charged...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam exposure correction system and method

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam guiding magnet for deflecting a particle beam

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Beam processing apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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