Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-03-21
2010-12-14
Berman, Jack I (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S398000, C250S492210
Reexamination Certificate
active
07851767
ABSTRACT:
A beam control assembly to shape a ribbon beam of ions for ion implantation includes a first bar, second bar, first coil of windings of electrical wire, second coil of windings of electrical wire, first electrical power supply, and second electrical power supply. The first coil is disposed on the first bar. The first coil is the only coil disposed on the first bar. The second bar is disposed opposite the first bar with a gap defined between the first and second bars. The ribbon beam travels between the gap. The second coil is disposed on the second bar. The second coil is the only coil disposed on the second bar. The first electrical power supply is connected to the first coil without being electrically connected to any other coil. The second electrical power supply is connected to the second coil without being electrically connected to any other coil.
REFERENCES:
patent: 5834786 (1998-11-01), White et al.
patent: 6423976 (2002-07-01), Glavish et al.
patent: 6933507 (2005-08-01), Purser et al.
patent: 6933607 (2005-08-01), Ono et al.
patent: 7078713 (2006-07-01), White
patent: 2005/0017202 (2005-01-01), White
patent: 2005/0082498 (2005-04-01), White
patent: 2005/0242294 (2005-11-01), Purser et al.
patent: 2006/0113494 (2006-06-01), Chen et al.
patent: 2006/0113495 (2006-06-01), Chen et al.
patent: 2007/0170369 (2007-07-01), Purser et al.
patent: 2008/0169426 (2008-07-01), Purser et al.
International Search Report and Written Opinion mailed on Aug. 27, 2008, for PCT Application No. PCT/US2008/057929 filed on Mar. 21, 2008, 10 pages.
Advanced Ion Beam Technology Inc.
Berman Jack I
Morrison & Foerster / LLP
Smyth Andrew
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