Beam deflecting method, beam deflector for scanning, ion...

Details Beam deflecting method, beam deflector for scanning, ion... Beam deflecting method, beam deflector for scanning, ion...

2006-11-21

2006-11-21

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S306000, C250S307000, C250S310000, C250S311000, C250S492100, C250S492200, C250S492300, C250S492210, C250S492220, C250S492230

Reexamination Certificate

active

07138641

ABSTRACT:
A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.

REFERENCES:
patent: 5041731 (1991-08-01), Oae et al.
patent: 5981961 (1999-11-01), Edwards et al.
patent: 6075249 (2000-06-01), Olson
patent: 6521895 (2003-02-01), Walther
patent: 6777696 (2004-08-01), Rathmell
patent: 6855929 (2005-02-01), Kimba et al.
patent: 2002/0003215 (2002-01-01), Berrian
patent: 2002/0028399 (2002-03-01), Nakasuji et al.
patent: 2002/0036264 (2002-03-01), Nakasuji et al.
patent: 2002/0148975 (2002-10-01), Kimba et al.
patent: 2003/0030008 (2003-02-01), Sobukawa et al.
patent: 2005/0092921 (2005-05-01), Nakasuji et al.
patent: 2005/0104013 (2005-05-01), Stengl et al.
patent: 2005/0121611 (2005-06-01), Kimba et al.
patent: 61-142646 (1986-06-01), None
patent: 10-64470 (1998-03-01), None
patent: 2003-513419 (2003-04-01), None
US 7,041,992, 05/2006, Stengl et al. (withdrawn)
Olson J C et al., “Scanned beam uniformity control in the VIISta 810 ion implanter”, Ion Implantation Technology Proceedings, 1998 International Conference on Kyoto, JAPAN, Jun. 22, 1998, PP. 22-26, vol. 1, Piscataway, NJ.

Affiliated with

Also associated with

Rating

Beam deflecting method, beam deflector for scanning, ion... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Beam deflecting method, beam deflector for scanning, ion..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Beam deflecting method, beam deflector for scanning, ion... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3700986