Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2004-03-12
2009-11-17
Vanore, David A. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S492210, C324S11700H
Reexamination Certificate
active
07619223
ABSTRACT:
The invention provides a nondestructive measuring method and measuring apparatus that assures a high noise immunity and is capable of performing high-accuracy beam current measurements. The inventive beam current measuring apparatus includes a magnetism shielding part for shielding an external magnetic field and a magnetic field sensor arranged in the shielding space generated by said magnetism shielding part, said beam current measuring apparatus measuring, by using said magnetic field sensor, a magnetic field where a beam current to be measured is generated, characterized in that said magnetic field sensor has a magnetic flux/feedback current conversion coefficient of 8×10−15Wb/A or above.
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Hatanaka Kichiji
Katayama Takeshi
Mizuno Bunji
Sasaki Yuichiro
Watanabe Tamaki
Johnston Phillip A.
Panasonic Corporation
Pearne & Gordon LLP
Riken
Vanore David A.
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