Beam processing apparatus

Details Beam processing apparatus Beam processing apparatus

2011-07-19

2011-07-19

Kim, Robert (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492100, C250S492200, C250S397000, C250S398000, C250S492210

Reexamination Certificate

active

07982192

ABSTRACT:
In a beam processing apparatus including a beam scanner having a two electrodes type deflection scanning electrode, the beam scanner further includes shielding suppression electrode assemblies respectively at vicinities of upstream side and downstream side of the two electrodes type deflection scanning electrode and having openings in a rectangular shape for passing a charged particle beam. Each of the shielding suppression electrode assemblies is an assembly electrode comprising one sheet of a suppression electrode and two sheets of shielding ground electrodes interposing the suppression electrode. A total of front side portions and rear side portions of the two electrodes type deflection scanning electrode is shielded by the two sheets of shielding ground electrodes.

REFERENCES:
patent: 4254340 (1981-03-01), Camplan et al.
patent: 5691537 (1997-11-01), Chen et al.
patent: 6060715 (2000-05-01), England et al.
patent: 6075249 (2000-06-01), Olson
patent: 6441382 (2002-08-01), Huang
patent: 6639227 (2003-10-01), Glavish et al.
patent: 7276711 (2007-10-01), Kawaguchi et al.
patent: 2005/0151089 (2005-07-01), Bong et al.
patent: 2006/0113467 (2006-06-01), Yagita et al.
patent: 2006/0113490 (2006-06-01), Matsushita et al.
patent: 2006/0113491 (2006-06-01), Kawaguchi et al.
patent: 2007/0108390 (2007-05-01), Radovanov et al.
patent: 1 662 542 (2006-05-01), None
patent: 1 981 059 (2008-10-01), None
patent: 02-005343 (1990-01-01), None
patent: 2006-156236 (2006-06-01), None

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