Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-09-26
2006-09-26
Wells, Nikita (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S310000, C250S311000, C250S3960ML
Reexamination Certificate
active
07112803
ABSTRACT:
A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.
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Karabekov Albert
Krivts (Krayvitz) Igor
Petrov Igor
Applied Materials Israel, Ltd.
Fahmi Tarek N.
Souw Bernard E.
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