Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Controlling the characteristics of implanter ion-beams

Cooling module for charged particle beam column elements

Cooling of a device for influencing an electron beam

Cooling of voice coil motors in lithographic projection...

Corpuscular beam blanking system

Corpuscular beam device

Corpuscular radiation device for producing an irradiation patter

Correcting method for correcting exposure data used for a...

Correction device for correcting chromatic aberration in particl

Correction device for correcting chromatic aberration in...

Correction device for correcting the lens defects in...

Correction device for correcting the spherical aberration in...

Correction device for the correction of lens aberrations in part

Correction of astigmatism in electron beam instruments

Correction system for a charged-particle beam apparatus

Corrective for eliminating the third-order aperture...

Corrector for axial aberrations in electron optic instruments

Corrector for charged-particle beam aberration and...