Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2011-08-02
2011-08-02
Johnston, Phillip A (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S397000
Reexamination Certificate
active
07989776
ABSTRACT:
A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other in the direction of the optical axis, in which each correction piece has a plurality of quadrupole fields (QP) and at least one octupole field (OP.) Each correction piece is constructed such that it is symmetrical with respect to its central plane (S, S′) with each correction piece having an uneven number of at least five quadrupole fields (QP) and at least one octupole field (OP). Each correction piece is further constructed so that it is symmetrical with respect to its central plane. The central quadrupole field is arranged so that it is centered with respect to the central plane of the correction piece and is electromagnetic. The quadrupole fields of the two correction pieces are antisymmetrical and a transfer lens system is arranged such that it is symmetrical with respect to the central plane of the corrective between the correction pieces. The transfer lens system has two round lenses and the setting of the transfer lens system takes place so that the two round lenses image the central plane of the two correction pieces anamorphically onto one another, in which the enlargement in one main section is the reciprocal of the enlargement in the other main section and with an octupole field superimposed on the central quadrupole field.
REFERENCES:
patent: 2003/0034457 (2003-02-01), Rose
patent: 2004/0155200 (2004-08-01), Muller
patent: 2005/0023480 (2005-02-01), Rose
patent: 1381073 (2004-01-01), None
Müller Heiko
Rose Harald
CEOS Corrected Electron Optical Systems GmbH
Chang Hanway
Johnston Phillip A
Vincent Paul
LandOfFree
Corrective for eliminating the third-order aperture... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Corrective for eliminating the third-order aperture..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Corrective for eliminating the third-order aperture... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2700396