Corrector for charged-particle beam aberration and...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S3960ML, C250S305000, C250S306000, C250S307000

Reexamination Certificate

active

07872240

ABSTRACT:
In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.

REFERENCES:
patent: 4251728 (1981-02-01), Pfeiffer et al.
patent: 4303864 (1981-12-01), Crewe et al.
patent: 6943349 (2005-09-01), Adamec et al.
Rose, H. “Outline of an ultracorrector compensating for all primary chromatic and geometrical aberrations of charged-particle lenses,” Nuclear Instruments & Methods in Physics Research, A519, 2004, pp. 12-27.
M. Szilagyi, “Electron and Ion Optics,” Microdevices: Physics and Fabrication Technologies New York: Plenum Press, 1988, s. 52-67, 118—ISBN 0-306-42717.6.
H. Rose et al., “Aberration Correction in Electron Microscopy,” Proceedings of 2005 Particle Accelerator Conference, pp. 44-48.
German Office Action , w/ English translation thereof, Issued in German Patent Application No. 10 2008 035 297.7-54 dated Mar. 30, 2010.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Corrector for charged-particle beam aberration and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Corrector for charged-particle beam aberration and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Corrector for charged-particle beam aberration and... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2733887

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.