Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2011-01-18
2011-01-18
Berman, Jack I (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C250S305000, C250S306000, C250S307000
Reexamination Certificate
active
07872240
ABSTRACT:
In a charged-particle beam apparatus having a high-accuracy and high-resolution focusing optical system for charged-particle beam, a group of coils are arranged along a beam emission axis to extend through the contour of radial planes each radiating from the beam emission axis representing a rotary axis and each having a circular arc which subtends a divisional angle resulting from division of a circumferential plane by a natural number larger than 2 so that a superposed magnetic field may be generated on the incident axis of the charged-particle beam and the trajectory of the charged-particle beam may be controlled by the superposed magnetic field.
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patent: 6943349 (2005-09-01), Adamec et al.
Rose, H. “Outline of an ultracorrector compensating for all primary chromatic and geometrical aberrations of charged-particle lenses,” Nuclear Instruments & Methods in Physics Research, A519, 2004, pp. 12-27.
M. Szilagyi, “Electron and Ion Optics,” Microdevices: Physics and Fabrication Technologies New York: Plenum Press, 1988, s. 52-67, 118—ISBN 0-306-42717.6.
H. Rose et al., “Aberration Correction in Electron Microscopy,” Proceedings of 2005 Particle Accelerator Conference, pp. 44-48.
German Office Action , w/ English translation thereof, Issued in German Patent Application No. 10 2008 035 297.7-54 dated Mar. 30, 2010.
Higuchi Yoshiya
Ito Hiroyuki
Kawasaki Takeshi
Sasaki Yuko
Berman Jack I
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Sahu Meenakshi S
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