Corpuscular beam device

Details Corpuscular beam device Corpuscular beam device

1990-11-14

1991-10-29

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250309, 250310, H01J 37252, G01T 120, G01N 2300, G01B 1500

Patent

active

050618563

ABSTRACT:
The invention relates to a corpuscular beam device, such as an ion beam dce or an electron beam device, in which a primary corpuscular beam is focussed by means of an objective lens onto a sample. The secondary radiation emitted at the point of impact of the primary beam is accelerated onto the central electrode of the objective lens, this electrode being coated with scintillation material, and there produces light pulses which are converted by a light-sensitive detector into electrical signals and amplified.

REFERENCES:
patent: 4442355 (1984-04-01), Tamura et al.
patent: 4658136 (1987-04-01), Ohtaka et al.
patent: 4831267 (1989-05-01), Brunner
patent: 4939371 (1990-07-01), Goto
patent: 4987311 (1991-01-01), Devore
patent: 4990778 (1991-02-01), Norioka

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