Correction device for correcting chromatic aberration in particl

Details Correction device for correcting chromatic aberration in particl Correction device for correcting chromatic aberration in particl

1997-09-18

1999-11-16

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

245296ML, H01J 3710, H01J 37145

Patent

active

059862696

ABSTRACT:
Particle-optical rotationally symmetrical lenses inevitably have chromatic aberration. This lens fault determines the limit of the resolution of known particle-optical apparatus at a comparatively low acceleration voltage (0.5 kV to 5 kV) of the particle beam. This lens fault cannot be eliminated by compensation by means of rotationally symmetrical fields. In order to enhance the resolution of the particle-optical apparatus nevertheless, it has already been proposed to mitigate said lens fault by means of a Wien type corrector. Such a known configuration is provided with a number of electrical and magnetic multipoles. In order to achieve easier adjustment of the various multipole fields, the pole faces (30-i) governing the multipole fields according to the invention have a specific length L=(2.pi..sup.2 n.sup.2)/(K.sub.obj.sup.2 C.sub.c,obj), in which K.sub.obj is the strength of the focusing lens to be corrected and C.sub.c,obj is the coefficient of chromatic aberration of this lens.

REFERENCES:
patent: 2919381 (1959-12-01), Glaser
patent: 4362945 (1982-12-01), Riecke
patent: 4684808 (1987-08-01), Plies et al.
patent: 4962309 (1990-10-01), White et al.
patent: 4962313 (1990-10-01), Rose

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