Corrector for axial aberrations in electron optic instruments

Details Corrector for axial aberrations in electron optic instruments Corrector for axial aberrations in electron optic instruments

1982-02-17

1983-11-08

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, 250311, H01J 312, H01J 37153

Patent

active

044144741

ABSTRACT:
Means for compensating for third and higher order aberrations in an electron optic system comprises two sextupoles and a field lens, the latter being spaced intermediate the sextupoles. The resolving power of the optic system can be reduced to the range of about 0.5 Angstrom unit.

REFERENCES:
patent: 3952198 (1976-04-01), Harada et al.
patent: 4303864 (1981-12-01), Crewe et al.
Hitachi Advertisement, Science, Jun. 10, 1983, vol. 220, No. 4602, p. 1112.

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