Corpuscular radiation device for producing an irradiation patter

Details Corpuscular radiation device for producing an irradiation patter Corpuscular radiation device for producing an irradiation patter

1982-03-26

1984-03-20

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

With target means

250311, 2504922, 2504911, H01J 37147, H01J 3726, H01J 3730

Patent

active

044383363

ABSTRACT:
A corpuscular radiation device for producing an irradiation pattern on a kpiece by means of a beam emitted from a first radiation source and a first corpuscular-optical lens system suited for forming said beam is provided. The corpuscular-optical lens system includes means for adjusting the workpiece having opposed major surfaces, an at least partially beam-transparent reference object and a free beam passage opening. At the side of the workpiece remote from the first radiation source there is provided a second corpuscular-optical lens system including a beam switch, a second radiation source, an image receiver with a receiver surface, and a detector.

REFERENCES:
patent: 2356633 (1944-08-01), Von Ardenne
patent: 3100260 (1963-08-01), Wilska
patent: 4338508 (1982-07-01), Jones et al.
Hawkes, Electron Optics and Electron Microscopy, 1972, pp. 190-191.

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