Electron beam exposure apparatus

Electron beam exposure apparatus and method, and device manufact

Electron beam exposure system and an apparatus for carrying out

Electron beam instrument

Electron beam irradiating apparatus and electric signal detectin

Electron beam lithographic method

Electron beam lithography system for delineating a desired patte

Electron beam pattern-writing column

Electron beam potential switching apparatus

Electron emission regulator for an x-ray tube filament

Electron flood exposure apparatus

Electron optics for multi-beam electron beam lithography tool

Electron projection lithography apparatus using secondary...

Electron radiation dose tailoring by variable beam pulse generat

Electron-beam exposure system for reduced distortion of electron

Electron-optical lens arrangement with an axis that can be...

Electron-optical system exhibiting reduced aberration

Electrostatically focused addressable field emission array...

Emitter device with focusing columns

Energetic electron beam assisted X-ray generator