Electron flood exposure apparatus

Details Electron flood exposure apparatus Electron flood exposure apparatus

1980-06-30

1982-03-23

Dixon, Harold A.

Radiant energy

With charged particle beam deflection or focussing

With target means

250400, 2504922, 313439, A61K 2702, G01K 108, H01J 2974

Patent

active

043214703

ABSTRACT:
An electron flood exposure apparatus is disclosed which is comprised of an electron gun for providing an electron beam; a dispersing means for converting the electron beam into an electron flood; a post dispersion collimation and acceleration grid; and a target holder for holding a microlithographic resist which is to be exposed by the flood of electrons after collimation and acceleration by the acceleration grid.

REFERENCES:
patent: 2860251 (1958-11-01), Pakswer et al.
patent: 3035203 (1962-05-01), Fischman
patent: 3133220 (1964-05-01), Whyman
patent: 3900760 (1975-08-01), Glenn et al.

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