Radiant energy – With charged particle beam deflection or focussing – With target means
Patent
1982-05-10
1984-01-17
Smith, Alfred E.
Radiant energy
With charged particle beam deflection or focussing
With target means
H01J 314
Patent
active
044265832
ABSTRACT:
The electron potential of an electron beam is switched between different values without moving the focal plane by effectively changing the axial position of the electron source at the same time that the electron potential is changed. The effective change in axial position of the electron source exactly compensates for the altered effectiveness which magnetic lenses have upon an electron beam of altered electron potential such that the final focal plane remains at the same position without adjusting the field strength of any magnetic lens.
REFERENCES:
patent: 3634645 (1972-01-01), Lempert et al.
patent: 3835327 (1974-09-01), Lawrence
patent: 4274035 (1981-06-01), Fukahara et al.
Chang Tai-Hon P.
Coane Phillip J.
Hohn Fritz-Jurgen
Kern Dieter P.
Berman Jack I.
Drumheller Ronald L.
International Business Machines - Corporation
Smith Alfred E.
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