Electron beam exposure apparatus

Details Electron beam exposure apparatus Electron beam exposure apparatus

1986-08-05

1987-10-20

Fields, Carolyn E.

Radiant energy

With charged particle beam deflection or focussing

With target means

2504922, 250396ML, 250397, G21K 1093, H01J 3707

Patent

active

047016205

ABSTRACT:
Disclosed is an electron beam exposure apparatus which includes an objective lens focusing an electron beam, and a dynamic focus correction lens dynamically correcting the focusing by the objective lens. The apparatus comprises a control circuit which, in order to prevent a current variation induced in the objective lens by the dynamic focus correction lens, controls current supplied to the objective lens so as to cancel the current variation induced in the objective lens due to the coil current of the dynamic focus correction lens.

REFERENCES:
patent: 4125772 (1978-11-01), Holmes
patent: 4544846 (1985-10-01), Langaer et al.

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