Method for inspecting settling time of deflection amplifier,...

Method for measurement of spotsize and edgewidth in electron bea

Method for producing image contrast by phase shifting in...

Method of and system for charged particle beam exposure

Method of automatically correcting aberrations in...

Method of automatically correcting aberrations in...

Method of correcting astigmatism of variable shaped beam

Method of fabricating multipole lens, multipole lens, and...

Method of forming a quadrupole device for projection...

Method of manufacturing electrostatic deflector, and...

Method of operating a particle-optical apparatus

Method of suppressing beam position drift, method of...

Methods and apparatus for scanning and focusing an ion beam

Methods and systems for trapping ion beam particles and...

Methods, based on a genetic algorithm, for configuring...

Micro lens array and micro deflector assembly for fly's eye elec

Microfabricated miniature grids

Miniature device for generating a multi-polar field, in...

Modular all-electrostatic electron-optical column and assembly o

Monopole magnetic lens field