Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2008-04-11
2010-11-09
Garber, Charles D (Department: 2893)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S281000, C029S419200
Reexamination Certificate
active
07829864
ABSTRACT:
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
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European Application No. 05 747 617.8 Communication Pursuant to Article 94(3) EPC, dated Aug. 19, 2009.
Collins Scott
Frederick Brian G.
LeGore Lawrence J.
Smith Rosemary
Garber Charles D
Hamilton Brook Smith & Reynolds P.C.
Rodela Eduardo A
Stillwater Scientific Instruments
University of Maine
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