Method of automatically correcting aberrations in...

Details Method of automatically correcting aberrations in... Method of automatically correcting aberrations in...

2006-08-22

2006-08-22

Vanore, David A. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML

Reexamination Certificate

active

07095031

ABSTRACT:
The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus extracts line profiles from the probe profile of the charged-particle beam. Features indicative of the line profile, i.e., μ, σ, and ρ indicating left-and-right asymmetry, width, and unevenness around the center, respectively, are extracted. An aberration amount calculator calculates amounts of aberrations corresponding to aberrations, respectively, in the charged-particle beam from the amounts of features μ, σ, and ρ. An aberration corrector corrects the aberrations in the beam.

REFERENCES:
patent: 5298757 (1994-03-01), Okayama
patent: 6025600 (2000-02-01), Archie et al.
patent: 6930312 (2005-08-01), Matsuya et al.
patent: 7012262 (2006-03-01), Rose
patent: 7030389 (2006-04-01), Kaneyama
patent: 2003-521801 (2003-07-01), None
Von H. Rose, “Abbildungseigeschaften sphärisch korrigieter elektronenoptischer Achromate” (Properties of Spherically Corrected Achromatic Electron-Lenses).Optic 33, Heft 1, 1971, pp. 1-24.
M. Haider, W. Bernhardt, and H. Rose, “Design and test of an electric and magnetic dodecapole lens”,Optic 63, No. 1, 1982, pp. 9-23.
J. Zach, “Design of a high-resolution low-voltage scanning electron microscope”,Optic 83, No. 1, 1989, pp. 30-40.
Joachim Zach, Maximilian Haider, “Aberration correction in a low voltage SEM by a multiple corrector”,Nuclear Instruments and Methods in Physics Research, A 363, 1995, pp. 316-325.

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