Modular all-electrostatic electron-optical column and assembly o

Details Modular all-electrostatic electron-optical column and assembly o Modular all-electrostatic electron-optical column and assembly o

1985-06-28

1987-04-28

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250398, 2504922, 313250, 313257, 313292, 313325, H01J 338

Patent

active

046617094

ABSTRACT:
The invention provides a modular-building block method and system of fabrication, installation, alignment and operation of a multi-beam assembly of miniaturized, all-electrostatic charged particle optical columns, such electron beam or ion beam optical columns mounted in parallel in a closely packed cluster over a small target surface area for parallel simultaneous charged particle beam writing on the target surface with the multiple-channel cluster of charged particle beam optical columns. The assembly provides a system and method of increased thru-put in the direct charged particle beam writing on semiconductor target wafers during fabrication of semiconductor micro-circuit chips.

REFERENCES:
patent: 3383537 (1968-05-01), Marshall
patent: 3462629 (1969-08-01), Bell

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