Method for producing image contrast by phase shifting in...

Details Method for producing image contrast by phase shifting in... Method for producing image contrast by phase shifting in...

2011-07-05

2011-07-05

Kim, Robert (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S306000, C250S307000, C250S310000, C250S311000, C250S3960ML

Reexamination Certificate

active

07973289

ABSTRACT:
According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least one anamorphic image, quadrupole fields before and after this image whose extent in the direction of the optical axis is equal to at least twice their focal length, and wherein at least one of the axial rays, by an appropriate choice of the magnification M of the intermediate image, enters the quadrupole field before the at least one anamorphic image at a slope 1/M such that a length of the anamorphic image is achieved at which any aberrations caused are still within a tolerable range. The invention also relates to devices for implementing this method.

REFERENCES:
patent: 7741602 (2010-06-01), Benner et al.
patent: 2008/0296509 (2008-12-01), Schroder et al.
patent: 10 2006 055 510 (2008-05-01), None
Harald H. Rose “Geometrical Charged-Particle Optics”, Springer-Verlag, Berlin (2009), pp. 81-83.
Ludwig Reimer and Helmut Kohl “Transmission Electron Microscopy”, Springer-Verlag, Berlin (2008), pp. 211-221.

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