Method of automatically correcting aberrations in...

Details Method of automatically correcting aberrations in... Method of automatically correcting aberrations in...

2006-12-05

2006-12-05

Vanore, David A. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000

Reexamination Certificate

active

07145154

ABSTRACT:
The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The apparatus has a memory for storing image data obtained by scanning a specimen with the beam. A four-sided region-blurring device reads the image data from the memory and blurs regions close to the four sides of an image represented by the image data. A probe profile extractor extracts the probe profile from the image that has been blurred as mentioned above. A correction amount-calculating unit performs extraction of amounts of features, calculations of aberrations. A correcting unit corrects the aberration corrector.

REFERENCES:
patent: 6723997 (2004-04-01), Matsuya et al.
patent: 6858844 (2005-02-01), Zach
patent: 2003-521801 (2003-07-01), None
M. Haider, W. Bernhardt, and H. Rose, “Design and test of an electric and magnetic dodecapole lens”,Optic 63, No. 1, 1982, pp. 9-23.
J. Zach, “Design of high-resolution low-voltage scanning electron microscope”,Optc 83, No. 1, 1989, pp. 30-40.
Joachim Zach, Maximilian Haider, “Aberration correction in a low voltage SEM by a multipole corrector”,Nuclear Instruments and Methods in Physics Research, A 363, 1995, pp. 316-325.

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