Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1998-06-19
2000-06-13
Arroyo, Teresa M.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
25049221, H01J 314, H01J 326
Patent
active
060752491
ABSTRACT:
Methods and apparatus are provided for scanning and focusing a charged particle beam, such as an ion beam. The apparatus includes a charged particle source for generating a charged particle beam, scan electrodes disposed on opposite sides of the charged particle beam and a postscan electrode disposed adjacent to the charged particle beam and downstream of the scan electrodes. A postscan voltage is applied to the postscan electrode. A scan voltage generator applies to the scan electrodes scan voltages for scanning the charged particle beam in a first direction. The scan voltages have negative DC voltage offsets which are preferably more negative than the postscan voltage. The charged particle beam is focused in a second direction orthogonal to the first direction. The invention may be used in an ion implanter to increase the ion beam current delivered to a target.
REFERENCES:
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patent: 4283631 (1981-08-01), Turner
patent: 4851693 (1989-07-01), Fisher
patent: 4899059 (1990-02-01), Freytsis et al.
patent: 4922106 (1990-05-01), Berrian et al.
patent: 5126575 (1992-06-01), White
patent: 5350926 (1994-09-01), White et al.
Arroyo Teresa M.
Varian Semiconductor Equipment Associates Inc.
Wells Nikita
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