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Apparatus and method for controlled particle beam manufacturing

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for controlling a beam shape

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for controlling a radiation device

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Apparatus and method for curing photosensitive coatings

Radiant energy – Irradiation of objects or material
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Apparatus and method for doping

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for doping

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for doping

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for doping

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for doping

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for electron beam irradiation having...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for electron beam lithography and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for focused electric field enhanced...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for forming a charged particle beam of...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for forming alignment layers

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Apparatus and method for forming photoresist pattern with...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for immersion lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for improved scanning efficiency in an ion

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for introducing impurity

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for ion beam implantation using...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Apparatus and method for irradiating electron beam

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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