Apparatus and method for forming alignment layers

Details Apparatus and method for forming alignment layers Apparatus and method for forming alignment layers

2005-02-01

2005-02-01

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C430S005000, C430S296000

Reexamination Certificate

active

06849858

ABSTRACT:
An object of the present invention is to provide an apparatus and method for ensuring a uniform orientation of liquid crystal molecules of an alignment layer by irradiation with ion beams. An apparatus of the present invention comprises a grid11ahaving a plurality of ion ejection holes30of various sizes. The size of the ion ejection hole30varies depending on an ion density. The size of the ion ejection hole30increases with decrease in the ion density.

REFERENCES:
patent: 5952155 (1999-09-01), Sakakibara et al.
patent: 6614033 (2003-09-01), Suguro et al.
patent: 6633366 (2003-10-01), de Jager et al.
patent: 6720680 (2004-04-01), Tanaka

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