Method and apparatus for forming optical materials and devices

Method and apparatus for generating ions

Method and apparatus for generation and implantation of ions

Method and apparatus for high efficiency scanning in an ion impl

Method and apparatus for implantation of doubly-charged ions

Method and apparatus for implanting radioactive gas in a base ma

Method and apparatus for implanting semiconductor wafer...

Method and apparatus for improved ion acceleration in an ion...

Method and apparatus for improved ion bunching in an ion...

Method and apparatus for improved ion dose accuracy

Method and apparatus for in situ anneal during ion implant

Method and apparatus for in situ removal of contaminants from io

Method and apparatus for in-situ plasma cleaning of electron bea

Method and apparatus for in-situ sample preparation

Method and apparatus for inspecting reflection masks for...

Method and apparatus for introducing normally solid material int

Method and apparatus for introducing normally solid materials in

Method and apparatus for ion beam formation in an ion implanter

Method and apparatus for ion beam formation in an ion implanter

Method and apparatus for ion beam generation