Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1989-11-07
1990-12-25
Berman, Jack I.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
250397, 250398, H01J 37304
Patent
active
049805622
ABSTRACT:
An ion beam scanning method and apparatus produce a parallel, scanned ion beam with a magnetic deflector having, in one instance, wedge-shaped pole pieces that develop a uniform magnetic field. A beam accelerator for the scanned beam has a slot-shaped passage which the scanned beam traverses. The beam scan and the beam traverse over a target object are controlled to attain a selected beam current and corresponding ion dose on a target object. Methods and apparatus are disclosed for increasing ion beam utilization efficiency without adversely effecting dose accuracy.
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Berrian Donald W.
Kaim Robert E.
Vanderpot John W.
Berman Jack I.
Cole Stanley Z.
Varian Associates Inc.
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