Method and apparatus for implanting semiconductor wafer...

Details Method and apparatus for implanting semiconductor wafer... Method and apparatus for implanting semiconductor wafer...

2006-05-30

2006-05-30

Lee, John R. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492200, C118S730000

Reexamination Certificate

active

07053386

ABSTRACT:
A gripper for loading wafers onto an implant wheel W and removing them from the wheel. The gripper having a substrate engaging mechanism (14) for engaging the substrate and a means for rotating this substrate engaging mechanism, such that wafers can be removed from the implant wheel, rotated to a second orientation and replaced without leaving the process chamber.

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