Method and apparatus for in-situ sample preparation

Details Method and apparatus for in-situ sample preparation Method and apparatus for in-situ sample preparation

2007-10-26

2010-11-09

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S492210, C250S492300, C250S42300F, C250S425000

Reexamination Certificate

active

07829870

ABSTRACT:
An apparatus for in-situ specimen preparation is described. The apparatus includes an ion beam column21including at least: an liquid metal alloy ion source56including a first element for providing a light ion species with a mass of 10 g/mol to 60 g/mol and a second element for providing a heavy ions species with a mass of 150 g/mol or higher, a mass separator58for selectively separating the light ion species and the heavy ion species, and a focusing element for focusing the ion beam on a specimen. The apparatus further includes a specimen-beam-tilt unit for tilting the ion beam with respect to the specimen.

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Extended European Search Report dated Nov. 9, 2007.

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