Positron beam lithography
Powder activation in an inert atmosphere
Power sag detection and control in ion implanting system
Power supply hardening for ion beam systems
Predicting dose repeatability in an ion implantation
Primary particle beam irradiation apparatus and method of irradi
Process and apparatus for converged fine line electron beam trea
Process and apparatus for converged fine line electron beam trea
Process and apparatus for implanting particles in a solid
Process and apparatus for making fine-scale patterns
Process and apparatus for obtaining beams of particles with a sp
Process and apparatus for optical near field microlithography
Process conditions change monitoring systems that use...
Process control methods for use with e-beam fabrication...
Process for channeling ion beams
Process for electron beam lithography, and electron-optical...
Process for forming a fine pattern having a high aspect ratio
Process for making patterns in resist and for making ion absorpt
Process for minimizing electrostatic damage and pole tip...
Process for modifying surfaces of materials, and materials...