Process and apparatus for converged fine line electron beam trea

Details Process and apparatus for converged fine line electron beam trea Process and apparatus for converged fine line electron beam trea

1981-01-12

1983-05-03

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

219121EM, 219121EB, 2504923, H01J 3700

Patent

active

043821863

ABSTRACT:
This disclosure is concerned with the use of fine line converged electron beams of high aspect ratio for effecting physical, chemical, mechanical and other changes in the surface of objects, and also volume effects, including applications, for example, to semiconductor and other materials surface modification technology, annealing, welding, etching, polishing, cutting, curing and other surface and volume alteration.

REFERENCES:
patent: 4151422 (1979-04-01), Goto et al.
patent: 4258266 (1981-03-01), Robinson et al.
patent: 4301369 (1981-11-01), Mutsuo et al.

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