Process and apparatus for converged fine line electron beam trea

Details Process and apparatus for converged fine line electron beam trea Process and apparatus for converged fine line electron beam trea

1983-01-03

1984-05-01

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250400, 219121EB, 219121EM, H01J 3700

Patent

active

044463731

ABSTRACT:
This disclosure is concerned with the use of fine line converged electron beams of high aspect ratio for effecting physical, chemical, mechanical and other changes in the surface of objects, and also volume effects, including applications, for example, to semiconductor and other materials surface modification technology, annealing, welding, etching, polishing, cutting, curing and other surface and volume alteration.

REFERENCES:
patent: 2729748 (1956-01-01), Robinson
patent: 3144552 (1964-08-01), Schonberg et al.
patent: 3193717 (1965-07-01), Nunan
patent: 3614423 (1971-10-01), Heynick et al.
patent: 3780334 (1973-12-01), Leboutet
patent: 4151422 (1979-04-01), Goto et al.
patent: 4258266 (1981-03-01), Robinson et al.
patent: 4301369 (1981-11-01), Mutsuo et al.

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