4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices
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Ion-processing method and apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion-projection apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ionized metal cluster beam systems and methods

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Irradiated film

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Irradiation device

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Irradiation system ion beam and method to enhance accuracy...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system ion beam and method to enhance accuracy...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system with ion beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system with ion beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system with ion beam/charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system with ion beam/charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Irradiation system with ion beam/charged particle beam

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Isolation mounts for use with vacuum chambers and their...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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