Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent
1979-05-29
1981-08-11
Anderson, Bruce C.
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
H01J 3706
Patent
active
042836301
ABSTRACT:
Irradiated film having substantial uniformity in the radiation dosage profile is produced by irradiating the film within a trough having lateral deflection blocks disposed adjacent the film edges for deflecting electrons toward the surface of the trough bottom for further deflecting the electrons toward the film edge.
REFERENCES:
patent: 2785313 (1957-03-01), Trump
patent: 2993120 (1961-07-01), Emanuelson
patent: 4178220 (1979-12-01), Fowler
Anderson Bruce C.
Harps Joseph P.
Lee, Jr. William D.
Toney John J.
W. R. Grace & Co.
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