Irradiation device

Details Irradiation device Irradiation device

2007-04-05

2011-11-08

Vanore, David A (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492300, C250S397000, C250S398000, C378S010000, C378S065000, C378S143000, C315S502000

Reexamination Certificate

active

08053746

ABSTRACT:
The present invention relates to an irradiation device for irradiating an irradiation object with heavy charged particles at an irradiation station, comprising a particle accelerator for providing a particle beam and a swivelling device for swivelling the particle beam impinging on the irradiation object, wherein the swivelling device comprises a carrier pivotable about an axis. In accordance with the invention, the irradiation device is characterized in that the particle accelerator is mounted on the pivotable carrier.

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patent: 4411171 (1995-10-01), None
ISA EPO; International Search Report of PCT/EP2007/003116; Jul. 4, 2007; 6 pages; NL.

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