Biased and serrated extension tube for ion implanter electron sh
Blanking aperture array type charged particle beam exposure
Block mask and charged particle beam exposure method and...
Boron ion sources for ion implantation apparatus
Bright beam method for super-resolution in e-beam lithography
Broad beam flux density control
Broad beam ion implanter
Broad range ion implanter
Bulk gas delivery system for ion implanters
Bulk material irradiation system and method