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Biased and serrated extension tube for ion implanter electron sh

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Blanking aperture array type charged particle beam exposure

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Block mask and charged particle beam exposure method and...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Boron ion sources for ion implantation apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Bright beam method for super-resolution in e-beam lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Broad beam flux density control

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Broad beam ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Broad range ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Bulk gas delivery system for ion implanters

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Bulk material irradiation system and method

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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