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Apparatus for producing ions of thermally labile or nonvolatile

Radiant energy – Ion generation – Electron bombardment type
Patent

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Apparatus operating with contact ionization for the production o

Radiant energy – Ion generation – Field ionization type
Patent

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Arc chamber filament for ion implanter

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Arc chamber for an ion implantation system

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Arc chamber for ion implanter

Radiant energy – Ion generation – Arc type
Patent

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Arc initiation in cathodic arc plasma sources

Radiant energy – Ion generation – Arc type
Reexamination Certificate

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Atomic jet radiation source

Radiant energy – Ion generation – Field ionization type
Patent

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Atomic level ion source and method of manufacture and operation

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Atomically sharp iridium tip

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Automatic cleaning of ion sources

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Axially compact field emission cathode assembly

Radiant energy – Ion generation – Field ionization type
Patent

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Beam-plasma type ion source

Radiant energy – Ion generation – Electron bombardment type
Patent

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Carbon nanotube electron ionization sources

Radiant energy – Ion generation – Electron bombardment type
Reexamination Certificate

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Cathode mounting for ion source with indirectly heated cathode

Radiant energy – Ion generation – Electron bombardment type
Patent

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Cesium injection system for negative ion duoplasmatrons

Radiant energy – Ion generation – Methods
Patent

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Charge conversion unit for negative ion source

Radiant energy – Ion generation – Field ionization type
Patent

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Charge converter provided in an ion implantation apparatus

Radiant energy – Ion generation – Field ionization type
Patent

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Charge exchange cell

Radiant energy – Ion generation – Field ionization type
Patent

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Charge exchange molecular ion source

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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Charged beam gun

Radiant energy – Ion generation – Field ionization type
Reexamination Certificate

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