Charged beam gun

Details Charged beam gun Charged beam gun

2007-12-12

2009-10-13

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S42300F, C250S430000, C250S493100, C315S111810

Reexamination Certificate

active

07601971

ABSTRACT:
The present invention provides a highly reliable charged beam gun designed in consideration for environmental protection, which prevents faulty insulation in a high-voltage connection. An insulating liquid is present in a gap formed between a connecting bushing and a receiving-side flange placed in a vacuum container, and the connecting bushing includes first piping and valve that provide communication between the gap and atmospheric air, and second piping and valve that provide communication between the gap and the atmospheric air, whereby the gap is cut off from the atmospheric air.

REFERENCES:
patent: 4563587 (1986-01-01), Ward et al.
patent: 6107628 (2000-08-01), Smith et al.
patent: 7138629 (2006-11-01), Noji et al.
patent: 2009/0101816 (2009-04-01), Noji et al.
patent: 2002-270125 (2002-09-01), None
patent: 2004-349155 (2004-12-01), None
Japanese Office Action dated Dec. 9, 2008 (Six (6) pages).

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