Implantation quality improvement by xenon/hydrogen dilution gas

Increased ionization efficiency in a mass spectrometer using...

Increased ionization rate in laser enrichment

Indirectly heated button cathode for an ion source

Inertial electrostatic confinement fusion

Infrared laser system

Instantaneous balance control scheme for ionizer

Intense ion beam generation with an inverse reflex tetrode (IRT)

Intense ion beam generator

Interfaces for a photoionization mass spectrometer

Ion beam apparatus

Ion beam collimating grid to reduce added defects

Ion beam extractor

Ion beam extractor with counterbore

Ion beam generating apparatus with electronic switching between

Ion beam generation apparatus

Ion beam generator

Ion beam generator

Ion beam gun and ion beam exposure device

Ion beam means