Radiant energy – Ion generation – Field ionization type
Reexamination Certificate
2004-10-15
2008-05-06
Wells, Nikita (Department: 2881)
Radiant energy
Ion generation
Field ionization type
C250S309000, C313S362100, C313S230000
Reexamination Certificate
active
07368727
ABSTRACT:
Ion source and method of making and sharpening. The ion source is a single crystal metal conductor having a substantially conical tip portion with substantial rotational symmetry. The tip portion terminates with a tip radius of curvature in the range of 50–100 nanometers. The ion source is made by electrochemical etching so that a conical tip of a selected geometry is formed. The ion source is then sharpened to provide a source of ions from a volume near the size of a single atom. Further, this ion source makes possible a stable and practical light ion microscope which will have higher resolution than existing scanning electron microscopes and scanning metal-ion microscopes.
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Leybourne James J.
Wells Nikita
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