Radiant energy – Ion generation – Field ionization type
Patent
1997-03-19
1998-11-17
Anderson, Bruce
Radiant energy
Ion generation
Field ionization type
H01J 2700
Patent
active
058380124
ABSTRACT:
A charge exchange cell for ion implanters employing a tandem accelerator has a hollow-wall construction with a heating element inserted inside the hollow wall.
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Bissonnette Daniel
LaFontaine Marvin
Quattrini Victor
Sakase Takao
Tokoro Nobuhiro
Anderson Bruce
Genus Inc.
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