Charge exchange cell

Details Charge exchange cell Charge exchange cell

1997-03-19

1998-11-17

Anderson, Bruce

Radiant energy

Ion generation

Field ionization type

H01J 2700

Patent

active

058380124

ABSTRACT:
A charge exchange cell for ion implanters employing a tandem accelerator has a hollow-wall construction with a heating element inserted inside the hollow wall.

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patent: 5543615 (1996-08-01), Saito et al.
patent: 5670785 (1997-09-01), Kitamura

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