Filament assembly for mass spectrometer ion sources

Flood gun for charge neutralization

Gas cluster ion beam emitting apparatus and method for...

High-efficiency electron ionizer for a mass spectrometer array

High-efficiency electron ionizer for a mass spectrometer array

High-efficiency electron ionizer for a mass spectrometer array

Increased ionization efficiency in a mass spectrometer using...

Indirectly heated button cathode for an ion source

Ion generating apparatus for semiconductor manufacturing equipme

Ion generating source for use in an ion implanter

Ion generation method and filament for ion generation apparatus

Ion generator

Ion generator and ion application system

Ion implantation device and a method of semiconductor...

Ion implantation ion source, system and method

Ion source

Ion source

Ion source

Ion source and method for using same

Ion source apparatus