Increased ionization efficiency in a mass spectrometer using...

Indirectly heated button cathode for an ion source

Ion generating apparatus for semiconductor manufacturing equipme

Ion generating source for use in an ion implanter

Ion generation method and filament for ion generation apparatus

Ion generator

Ion generator and ion application system

Ion implantation device and a method of semiconductor...

Ion implantation ion source, system and method

Ion source

Ion source

Ion source

Ion source and method for using same

Ion source apparatus

Ion source device

Ion source for generating ions of a gas or vapor

Ion source having replaceable and sputterable solid source...

Ion source with capability of changing between operation modes

Ion volume ring

Ionization device for aerosol mass spectrometer and method...