Ion generating apparatus for semiconductor manufacturing equipme

Details Ion generating apparatus for semiconductor manufacturing equipme Ion generating apparatus for semiconductor manufacturing equipme

1998-04-22

1999-10-26

Nguyen, Kiet T.

Radiant energy

Ion generation

Electron bombardment type

250423R, 250424, H01J 3708

Patent

active

059733292

ABSTRACT:
An ion generating apparatus for semiconductor fabricating equipment includes a device for reversing the orientation of a magnetic field. In this manner, the potential energy of a plurality of filaments in the ion generating apparatus are maintained at a substantially equal level, and consequently, asymmetric damage to one of the plurality of filaments due to concentration and collision of the thermal electrons is prevented, thereby prolonging the maintenance cycle of the ion generating apparatus.

REFERENCES:
patent: 5189303 (1993-02-01), Tanjyo et al.

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