Indirectly heated button cathode for an ion source

Details Indirectly heated button cathode for an ion source Indirectly heated button cathode for an ion source

2005-04-12

2005-04-12

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Electron bombardment type

C250S426000, C250S424000

Reexamination Certificate

active

06878946

ABSTRACT:
An indirectly heated button cathode for use in the ion source of an ion implanter has a button member formed of a slug piece mounted in a collar piece. The slug piece is thermally insulated from the collar piece to enable it to operate at a higher temperature so that electron emission is enhanced and concentrated over the surface of the slug piece. The slug piece and collar piece can be both of tungsten. Instead the slug piece may be of tantalum to provide a lower thermionic work function. The resultant concentrated plasma in the ion source is effective to enhance the production of higher charge state ions, particularly P+++for subsequent acceleration for high energy implantation.

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