Ion generator

Details Ion generator Ion generator

1990-11-09

1992-03-31

Berman, Jack I.

Radiant energy

Ion generation

Electron bombardment type

31511181, 313230, 3133621, H01J 304

Patent

active

051011107

ABSTRACT:
An ion generator comprises an electron-generating chamber and an ion-generating chamber. Ions are generated by introducing a raw material gas into the ion-generating chamber and irradiating the raw material gas with electrodes generated in the electron-generating chamber. The ions, thus generated, are drawn by ion-collecting electrodes and guided out of the ion-generating chamber through a slit formed in the ion output section of the ion-generating chamber. That corner of the ion-generating chamber which faces the ion-collecting electrodes is curved, and that outer wall of the ion-generating chamber which faces the ion-collecting electrodes is specular. With this structure, an undesirable spark discharge does not easily take place with reference to the ion-collecting electrodes, so that damage to the structural components of the ion generator is suppressed. Further, the ion output section is removable from the main body of the ion-generating chamber. Therefore, only the ion output section can be replaced with a new one, if it is worn out.

REFERENCES:
patent: 2258149 (1941-10-01), Schutze
patent: 3601649 (1971-08-01), Steigerwald
patent: 4166952 (1979-09-01), Colby et al.
patent: 4383177 (1983-05-01), Keller et al.

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