Flood gun for charge neutralization

Details Flood gun for charge neutralization Flood gun for charge neutralization

2006-06-27

2006-06-27

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Electron bombardment type

C250S42300F, C250S424000, C250S251000, C250S492200, C250S492210, C250S492300, C250S3960ML

Reexamination Certificate

active

07067821

ABSTRACT:
A flood gun10for charge neutralization of an analysis region Raof a sample S downstream of the flood gun, comprising: a first source30of electrons; a second source50of positively charged particles; and an extraction and focusing assembly60,64,arranged to: (i) extract a first, electron beam from the first source and focus the first beam to a first flood area Aeat the analysis region; and (ii) extract a second, positive particle beam from the second source and focus the second beam to a second flood area Aiat the analysis region. The electron beam and the positive particle beam may both be extracted and focused simultaneously, in a single mode of operation or, alternately, in a dual mode of operation. A corresponding method of providing charge neutralization and a spectroscopic system for secondary particle emission analysis are disclosed.

REFERENCES:
patent: 4680467 (1987-07-01), Bryson, III et al.
patent: 5432345 (1995-07-01), Kelly
patent: 5990476 (1999-11-01), Larson et al.
patent: 6329650 (2001-12-01), Dudnikov
patent: 6683320 (2004-01-01), Gerlach et al.
patent: 6979822 (2005-12-01), Stewart et al.
patent: 0 537 961 (1999-08-01), None
patent: 3 026 948 (1991-02-01), None
Technical note VG022T, “Method for Charge Compensation on Sigma Probe, Theta Probe and Theta 300”, Apr. 2003.
Larson et al., P. E. , J. Vac. Sci. Technol. A 16 (6), “Surface charge neutralization of insulating samples in x-ray photomission spectroscopy” pp. 3483-3489, Nov./Dec. 1998.
Harting et al., E., “A Low Convergence Electron Gun for Energies above 2 eV”, The Review of Scientific Instruments, vol. 41, No. 1, pp. 97-101, Jan. 1970.
Hunt et al., C. P., “The Surface Analysis of Insulators by SIMS: Charge Neutralization and Stabilization of the Surface Potential” Surface and Interface Analysis, vol. 3, No. 4, pp. 157-160, 1981.
Yu et al, X., “Pressure Dependence of the Charging Effect in Monochromatized Small Spot X-ray Photoelectron Spectroscopy”, Journal of Electron Spectroscopy and Related Phenomena, vol. 50, pp. 19-29, 1990.
Yu et al., X., “Some aspects of the charging effect in monochromatized focused XPS”, Fresenius J. Anal Chem, pp. 233-236, 1993.
Moulder et al., J. “The PHI Interface”, Physical Electronics, vol. 17, No. 1, 1997.
Edgell et al., M. J., “The Use of an Electron Flood Gun When Adopting MonochromaticAgLαRadiation for the XPS Analysis of Insulators”, Surface and Interface Analysis, vol. 8, pp. 113-119, 1986.
Bryson, III, C. E., “Surface Potential Control in XPS”, Surface Science, pp. 50-58, 1987.
Cazaux et al., J., “Some physical descriptions of the charging effects of insulators under incident particle bombardment”, Journal of Electron Spectroscopy and Related Phenomena, vol. 59, pp. 49-71, 1992.

Affiliated with

Also associated with

Rating

Flood gun for charge neutralization does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Flood gun for charge neutralization, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Flood gun for charge neutralization will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3696033