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Partial coherence varier for microlithographic system

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Passivation of multi-layer mirror for extreme ultraviolet...

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Pattern exposure apparatus using polychromatic light source

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Pattern generating systems

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Pattern transfer optical system

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Pattern writing apparatus and block number determining method

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Pattern writing apparatus and pattern writing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Pattern writing apparatus and pattern writing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Pattern writing system and pattern writing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Patterned grid element polarizer

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Patterning apparatuses and methods for the same

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Patterning systems using photomasks including shadowing...

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Period reconfiguration and closed loop calibration of an...

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Photoelectric scanner

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Photograph copier using a diffusing means to enable scanning wit

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Photographic color enlarger

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Photographic contrast control device

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Photographic contrast enhancement system using photochromic glas

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Photographic copier

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Photographic copier with masking device and copying method

Photocopying – Projection printing and copying cameras – Illumination systems or details
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